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ES612A ESD TESTER (HBM, HMM, MM)

1. Description

The model ES612A ESD Tester is a 2-Pin tester designed for the evaluation of devices at both wafer level and package level. The tester is designed to carry HBM, HMM and MM ESD standards. Determination of ESD failure thresholds is made easy using one of the external DC characterization measurement capabilities. The unit can be expanded with our automatic multi-pin device tester and be used as part of your device qualification process.

The pulse source design and pulse source delivery method ensure waveform performance directly at the device under test. Current waveforms can be automatically captured and analyzed for each ESD event. In addition, voltage waveforms can be captured and used to determine the turn-on level of protection circuit. They can also be used as a means of failure determination, as the DC characterizations show changes after ESD events.

2. Features

Low Parasitic HBM/HMM/MM 2-pin tester with high quality pulses
Very configurable and expandable
Friendly for probe station
Automatic External Module Detection
Large Touch Panel and Firmware Upgradable
Optional Software Controlled Automated Pulse and Failure Measurement
Optional Pulsed IV and DC IV Characterization

3. Applications

General device level ESD test for wafer, packaged, PCB and system devices
HBM module meets ANSI/ESDA/JEDEC JS-001, MIL-STD-883, AEC-Q-101-001 and MIL-STD-750
HMM module meets ANSI/ESD SP5.6, 50 Ohm Method
MM module meets ANSI/ESD STM5.2

4. Specifications

ES612A Controller Options

Parameters	ES612A-2K	ES612A-4K	ES612A-6K	ES612A-8K	ES612A-12K	ES612A-20K	ES612A-30K	Unit
Output voltage	± 10 ~ 2k	± 10 ~ 4k	± 10 ~ 6k	± 10 ~8k	± 10 ~ 12k	± 10 ~ 20k	± 10 ~ 30k	V
Output voltage step	1V up to 500V, 10V up to max voltage
Output voltage precision	Better than ± 1 % ± 5 V
Dimensions	347 X 300 X 145							mm
Weight	5	6	6	6	6	7	8	kg
V and I Measurement	Passive voltage and current probes
Supported Oscilloscopes	Majority models from Keysight, Tektronix, LeCroy.
Supported SMU	Keysight 2900 Series, Keithley 24xx/26xx series SMU.

HBM External Human Body Model Module

(Per ANSI/ESDA/JEDEC JS-001)

Parameters	HBM-2K	HBM-4K	HBM-6K	HBM-8K	HBM-12K	HBM-20K	HBM-30K	Unit
Output voltage	± 10 ~ 2k	± 10 ~ 4k	± 10 ~ 6k	± 10 ~8k	± 10 ~ 12k	± 10 ~ 20k	± 10 ~ 30k	V
Discharge RC Value	C: 100 pF ± 10%, R: 1.5k? ± 1%
Short Load Peak Current Ips	0.67A ± 10 % per kV							A
Short Load Rise Time Trs	2 < Trs < 10							ns
Short Load Decay Time Tds	130 < Tds < 170							ns
Short Load Ringing Irs	< 15% of Ips
500 ? Load Peak Current Ipr	Ipr/Ips ≥ 63%
500 ? Load Rise Time Trr	5 < Trr < 25							ns

HMM External Human Metal Model Module
(Per ANSI/ESD SP5.6)

Parameters	HMM-12K	HMM-24K	HMM-36K	Unit	Comments
HMM first peak current	45	90	135	A	3.75 A per 1 kV ≤ ± 10 % IEC 61000-4-2 (R=330?, C=150pF)
HMM current @ 30 ns	24	48	72	A	≤ ± 10 % (better than ±30% IEC )
HMM current @ 60 ns	12	24	36	A	≤ ± 10 % (better than ±30% IEC )

MM External Machine Model Module

(Per ANSI/ESD STM5.2)

Parameters	MM-2	MM-4	Unit	Comments
Output Voltage	±10 ~ 2000	±10 ~ 4000	V
Discharge RC Value	C: 200 pF, R: 0 ?
Short Load Peak Current Ip1	1.75±10% per 100V		A	Waveforms above 3kV will no longer exhibit linear increase. Tolerance may be different if socket is used
Short Load Ip2	67% ~ 90% of Ip1		A
Short Load Pulse Period tpm	66 < tpm < 90		ns
500 ? Load Peak Current Ipr	0.85 – 1.2		A	@400V condition per standard
500 ? Load I100	0.23 – 0.4		A	@400V condition per standard
500 ? Load I200	30 -50% of measured I100		A

ES612-SIVI Tester Integrated Static IV Module

Parameters	ES612-SIVI	Unit	Comments
Source Voltage	0 ~ ±40	V
Min Step Size	0.1	V
Accuracy	±1%±50mV		Tolerance maybe different
Max Source Current	100	mA
Measured Current Accuracy	±1%±40nA

5. Ordering Information

Line	Part # or Option #	Description
ESD Tester
1.1	ES612A-2K	ES612 ESD Tester, Max 2kV, USB Supported
	ES612A-4K	ES612 ESD Tester, Max 4kV, USB Supported
	ES612A-6K	ES612 ESD Tester, Max 6kV, USB Supported
	ES612A-8K	ES612 ESD Tester, Max 8kV, USB Supported
	ES612A-12K	ES612 ESD Tester, Max 12kV, USB Supported
	ES612-20K	ES612 ESD Tester, Max 20kV, USB Supported
	ES612-30K	ES612 ESD Tester, Max 30kV, USB Supported
1.2	ES612A-HBM-2	Human Body Model 2 Pin Module, 2kV
	ES612A-HBM-4	Human Body Model 2 Pin Module, 4kV
	ES612A-HBM-6	Human Body Model 2 Pin Module, 6kV
	ES612A-HBM-8	Human Body Model 2 Pin Module, 8kV
	ES612A-HBM-12	Human Body Model 2 Pin Module, 12kV
	ES612A-HBM-20	Human Body Model 2 Pin Module, 20kV
	ES612A-HBM-30	Human Body Model 2 Pin Module, 30kV
1.3	ES612A-HMM-12	Human Metal Model 2 Pin Module, 12kV equivalent HMM
	ES612A-HMM-24	Human Metal Model 2 Pin Module, 24kV equivalent HMM
	ES612A-HMM-36	Human Metal Model 2 Pin Module, 36kV equivalent HMM
1.4	ES612A-MM-2	Machine Model 2 Pin Tester Module, 2kV
	ES612A-MM-4	Machine Model 2 Pin Tester Module, 4kV
1.5	ES612-SIVI	Tester Integrated Static IV Module (Allow DUT failure check without SMU or PC)
Accessories
2.1	CT-T03-1p0	Current Probe 2kHz to 2 GHz, 1 V/A (Better than Tektronix CT1 & CT2)
2.2	HBM-BA1	HBM Board Level Test Accessories Set, Including Cables, Adapters, Calibration Kit and Current Probe
2.3	MM-BA1	MM Board Level Test Accessories Set, Including Cables, Adapters, Calibration Kit and Current Probe
2.4	ES612A-HBM-WA1	ES612A HBM or MM Wafer Level Test Accessories Set, Including Probe Arms, Needles, and Micro-positioners
2.5	ES612A-HMM-WA1	ES612A HMM Wafer Level Test Accessories Set, Including Probe Arms, Needles, and Micro-positioners
2.6	CMPS-200A	Compact Manual Probe Station
2.7	HBM-TC0.3	0.3 mm Pitch Test Clip for Packaged IC Probe
2.8	XYZM-PP048	0.48 mm Pogopin for package level test (pack of 20)
2.9	XYZM-TN1	Tungsten Needles – 5 mils sharp tip, for wafer level test (pack of 10)
Third Party
3.1	KSMU2450	SMU, 200V, 1A, 20W, Single Channel (For device DC automation failure check))
3.2	MISC-OSC-1G	1 GHz BandWidth, 5Gs/S, 4Ch Oscilloscope
3.3	MISC-OSC-200M	200 MHz BandWidth, 2Gs/S, 4Ch Oscilloscope
3.4	MISC-OSC-350M	350 MHz BandWidth, 2Gs/S, 4Ch Oscilloscope
Automation Solution
4.1	HBM-RE64X2	64 Pin Relay Expansion Module for HBM Automation
4.2	HBM-RE128X2	128 Pin Relay Expansion Module for HBM Automation
4.3	HBM-RE256X2	256 Pin Relay Expansion Module for HBM Automation (Obsoleted)
4.4	ES62X-PC-SW1	PC included Automation Software for 2-Pin, Pulse & SMU
4.5	ES62X-PC-SW2	PC included Automation Software for 2-Pin, Pulse, OSC & SMU
4.6	ES62X-PC-SW3	PC included Automation Software for Expansion Module 1 pulse to 1 GND pin test, Pulse, OSC & SMU
4.7	ES62X-PC-SW4	PC included Automation Software for Expansion Module 1 pulse to multi GND pins test, Pulse, OSC & SMU
4.8	ES650-150	Full Automation 2 Pin Low Parasitic Robotic Automaton Solution (Unlimited Pin, no need of PCB, PC & full-automation software Included) ES612A ESD TESTER (HBM, HMM, MM)

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