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產(chǎn)品簡介
詳細(xì)介紹
納米位移臺
A.組裝后效果及參數(shù)
· Cryogenic + Non-magnetic
· Load, max: 2 kg
B,單軸參數(shù)
Precision Piezo Stage PPS-20
The PPS-20 is a high-precision, long travel linear piezo stage. Miniature crossed roller bearings assure high stiffness and guiding accuracy for loads up to 20 N （horizontal orientation）. It utilizes our patent-pending multi-phase piezo motor resulting in high speed （> 2 mm/s） and high blocking force （> 2 N）. The PPS-20 is available in open loop or with an external encoder. Closed-loop resolution of 2 nm is achievable. Versions capable of operation in vacuum （10-9 mbar） and/or cryo （4 Kelvin） are available. The PPS-20 is compatible with the MMC-100 and MMC-110 controllers.
| Key features · Travel: 12 - 51 mm · Load, max: 2 kg · Speed, max: 2 mm/s · Resolution, typical: 2 nm · Repeatability, bi-directional: ± 20 nm · Repeatability, uni-directional: 20 nm · Encoder Options: Analog, Digital |
| Travel Dependent Specifications | |||||
| Travel range [mm] | 12 | 18 | 26 | 38 | 51 |
| Straightness/Flatness [µm] | ± 1 | ± 1.5 | ± 1.5 | ± 2 | ± 2.5 |
| Pitch [µrad] | ± 60 | ± 80 | ± 80 | ± 90 | ± 100 |
| Yaw [µrad] | ± 70 | ± 90 | ± 90 | ± 100 | ± 100 |
| Weight [g] | 17 | 24 | 34 | 51 | 68 |
| Motor Compatibility | |
| Motor option | Piezo Motor, PM-002 |
| Speed, max [mm/s] | 2 （MMC-100）, 10 （MMC-110） |
| Motor/Feedback Dependent Specifcations | |||
| Encoder option | None （open loop） | Analog （1 Vpp） | Digital （RS-422） |
| Resolution, typical [nm] | 1 | 10 | 2 |
| Repeatability, bi-directional [nm] | n/a | ± 50 | ± 20 |
| Repeatability, uni-directional [nm] | n/a | 50 | 20 |
| Accuracy [µm] | - | ± 1 | ± 1 |
| Load Characteristics | ||||||
| Orientation | Fx [N] | Fy [N] | Fz [N] | Mx [N·m] | My [N·m] | Mz [N·m] |
| Load, max | 2 | 20 | 20 | 0.7 | 0.7 | 0.7 |
C, 控制器
 | Modular Motion Driver MMD-100 · Driver for stick-slip, multi-phase piezo stages · Open loop resolution down to 1 nm · Closed loop resolution down to 2 nm · MMD-100 and MMC modules can be mixed in a stack · Pulse and direction input signals via mini-DIN connector |
生產(chǎn)廠商: 美國MICRONIX