目錄:上海西努光學(xué)科技有限公司>>自動化設(shè)備>>WDI ATF>> ATF6-PZ Sensor
The ATF6PZ SWIFT
WDI’s ATF6PZ SWIFT is a high speed, high accuracy, autonomous digital autofocus sensor. Its “Smart Sensor Architecture” (SSA) incorporates a semiconductor laser, built-in CMOS image sensor, FPGA and microprocessor for fast digital image processing. By projecting a laser line onto the sample and digitally processing the image, the ATF6PZ SWIFT provides fast and precise output to accuray control the focus position of external piezo Z actuators and stages. By supplying an analog output, the sensor can connect and direct a piezo Z device without the need to go through a secondary controller.
High Accuracy At Fast Speeds
WDI’s ATF6PZ SWIFT sensors project their focusing laser directly through the objective lens of the microscope. This “Through The Lens” (TTL) technique allows the sensor to provide extremely accurate autofocus, with a success rate typically higher than 99%. The ATF6PZ SWIFT’s onboard digital processing coupled with an improved faster sampling rate allows it to maintain this accuracy with 3 times the speed of previous versions. As the sensor connects directly to the piezo Z device autofocus times are shortened.
Static or Dynamic Autofocus
The ATF6PZ SWIFT is continually assessing distance and direction to focus, updating its data every 0.15 milliseconds. This allows the sensor to keep samples in focus regardless of whether they are stationary or in motion. This powerful tracking autofocus makes it perfect for scanning very large specimens precisely at very high speeds.
Maximum Flexibility
By projecting a laser line, the AFT6PZ SWIFT sensor operates equally effectively on patterned and un-patterned specimens as well as diffusing and reflective surfaces making it ideal for media such as TFT arrays and photo masks. The sensor also automatically adjusts its laser intensity and sensor expose time, allowing it to adapt from low reflectivity (down to 1%) to highly reflective (99%) surfaces. It is compatible with objectives from 2X to 100X, and wavelengths including UV, NUV and NIR.
Easy Integration
All of the sensors in WDI’s ATF family are designed with ease of integration in mind. They are compatible with most types of infinity corrected microscope objectives. The AFT6PZ SWIFT comes as a stand-alone sensor with analog output for direct connection to an external piezo a Z actuator or stage amplifier. All WDI’s ATF sensors have small, standardized footprints and connections, and can output in either analog or digital formats, making them both easy to install and easy to upgrade as application requirements evolve.
ATF6PZ SWIFT AUTO FOCUS & TRACKING SYSTEM
| ATF6-PZ Sensor | |
| Structured Light Pattern | Line Segment |
| Sensor Wavelength | Choice of 660nm or 785nm |
| Image Detector | Line Scan CMOS |
| Internal Update Rate | 20kHz |
| Static Autofocus Accuracy | ± 1/4 Objective Depth of Focus |
| Fast Tracking Autofocus Accuracy | ± 1/2 Objective Depth of Focus |
| General Performance | |
| Output Data Rate | 6.5kHz |
| Reflectivity Adaption Delay | 1ms |
| Laser Type | Semiconductor |
| Laser Safety | Class 2 660, 785nm |
| Weight | 250g |
| Dimensions | 40 X 40 X 120mm |
| Maximum Cable Length | 1.8m |
| Compliance | CE SEMI |
| External Requirements | |
| Specimen Reflectivity | Specimen Reflectivity |
| Glass Thickness | > 0.5mm |
| Diffusing Specimen | Yes |
| Specular Specimen | Yes |
| Specular Specimen | Yes |
| Textured Specimen | Yes |
| Operating Specifications | |
| Input Voltage | 18V to 25V, 24V Nominal |
| Operating Temperature | 18°C ~ 35°C |
| Storage Temperature | 10°C ~ 45°C |
| Humidity | 10% ~ 90% Non Condensing |
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