敞開式直線光柵尺設(shè)計用于需要高精度測量的機(jī)床和系統(tǒng)
典型應(yīng)用包括：
- 半導(dǎo)體工業(yè)的測量和生產(chǎn)設(shè)備
- PCB電路板組裝機(jī)
- 超精密機(jī)床
- 高精度機(jī)床
- 測量機(jī)和比較儀，測量顯微鏡和其它精密測量設(shè)備
- 直接驅(qū)動
Absolute position measurement
Series | Description | Position error
per signal period | Measuring length |
|---|
 LIC
| The LIC exposed linear encoders permit absolute position measurement both over large paths of traverse up to 27 m and at high traversing speed. In their dimensions and mounting, they match the LIDA 400. | ± 0.08 µm | Up to 27040 mm |
|---|
LIP 200 | The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard. | ± 0.001 µm | 20 mm to 3040 mm |
|---|
Incremental linear measurement
Series | Description | Position error
per signal period | Measuring length |
|---|
LIP | The LIP exposed linear encoders are characterized by very small measuring steps together with very high accuracy and repeatability. They operate according to the interferential scanning principle and feature a DIADUR phase grating as the measuring standard. | Up to ± 0.001 µm | Up to 3040 mm |
|---|
LIF | The LIF exposed linear encoders have a measuring standard manufactured in the SUPRADUR process on a glass substrate and operate on the interferential scanning principle. They feature high accuracy and repeatability, are especially easy to mount, and have limit switches and homing tracks. The special version LIF 481 V can be used in high vacuum up to 10–7 bar (see separate Product Information sheet). | ± 0.04 µm | Up to 1020 mm |
|---|
LIDA | The LIDA exposed linear encoders are specially designed for high traversing speeds up to 10 m/s, and are particularly easy to mount with various mounting possibilities. Steel scale tapes, glass or glass ceramic are used as carriers for METALLUR graduations, depending on the respective encoder. They also feature a limit switch. | Up to ± 0.2 µm | Up to 30040 mm |
|---|
PP | On the PP two-coordinate encoder, a planar phase-grating structure manufactured with the DIADUR process serves as the measuring standard, which is scanned interferentially. This makes it possible to measure positions in a plane. | ± 0.04 µm | Measuring range 68x68mm |
|---|
ROD431.001-1024, ID: 309288-01,
ROD431.020-1024 ID: 538727-02
ROD431-1024 317393-02, 317393-52, 538727-52ROD320.001ROD320.002, 254847-05ROD320.005
ROD320.007
ROD323
ROD436
ROD323.001-1024 ID:237974-01
ROD323.031-1024 ID:377101-5R
RON350-2048, 254426-04
ROD431.001-2048, ID:317393-03
ROD431-1024,ID:317393-52
ROD431.001-1024, ID: 309288-01,
ROD431.020-1024 ID: 538727-02
ROD431-1024 317393-02, 317393-52, 538727-52ROD320.005-2500 ID: 291843-01ROD320-2500, ID:538723-01
ERN1381.020-2048 , ID: 385489-06
EQN1125.030
EQN1325.020-2048, ID: 538234-01
EQN1325, ID: 312214-53
EQN1325.001-2048, ID312214-16
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