高真空磁控濺射設備 AccuSputter AW 4450 系列
設備主要配置（典型）：
1.PE4450系列主框架。
2.DC可編程10KW電源。型號：Advanced Energy, MDX-10k 或者DC可編程5KW電源。型號：Advanced Energy, MDX-5k （可選）
3.RF發(fā)生器,功率1200W。型號：ENI，OEM-12A（可選）
4.DC濺射功能（可選）
5.RF濺射功能（可選）
6.RF刻蝕（清洗）功能（可選）
7. RF Bias濺射功能（可選）
8.系統(tǒng)配置三只三角形（Delta）靶陰極（靶和靶材由客戶負責選擇、提供）或者四個2-8英寸圓靶陰極
9.自動RF Matching。（可選）
10.Cryopump冷泵及壓縮機。
11.Load lock功能。
12.機械泵，分子泵（可選）
13.靶陰極以及襯底均可冷卻。
14.MFC: 兩套，Ar 100 SCCM和 N2 100 SCCM（可選zui多三路）
15.承片盤可以放厚度在1毫米，直徑0-200毫米樣品
16.承片臺一次可以放置12片4英寸片，7片6英寸，一次可以濺射1-12片4英寸片或1-7片6英寸片
17.濺射均勻性：厚度誤差<5%
18.濺射速度：實現(xiàn)濺射金：>200A/分鐘/KW，金鍺>100A/分鐘/KW，鈦: >80A/分鐘/KW
控制軟件
Allwin21濺射臺升級套件。
1、系統(tǒng)采取全新觸摸屏電腦控制，Allwin21控制軟件,可以實時數(shù)據(jù)采集和監(jiān)控，工藝數(shù)據(jù)和結果可以電腦存儲，GUI界面。
2、系統(tǒng)設置等級口令控制，使管理者、工藝工程師和操作員根據(jù)不同*等級使用軟件。
3、用戶可以通過GUI界面，方便地手動控制和診斷包括傳片、模式選擇、靶位、功率、承片臺升降、承片臺轉速、泵閥開關和氣體流量等功能和參數(shù)，也可以手動進行工藝操作。
用戶可自行編寫工藝菜單，設定工藝步驟、工藝時間、承片臺轉速、氣體流量、真空度和功率等基本工藝參數(shù)。系統(tǒng)可以根據(jù)工藝菜單自動運行工藝流程。各種工藝流程的工藝菜單可作為文件保存，調(diào)用方便。
a
主要設備
保護氣氛快速退火爐
AccuThermo AW 410
AccuThermo AW 610
AccuThermo AW 810
AccuThermo AW 820
AccuThermo AW 830
其他半導體設備
半導體量測設備
KLATencor M-Gage 300
AccuMgage 350
AccuMgage 400
HP 4062UX
HP 4145A/B
EG 2001 Wafer Probe
EG 1034 Wafer Probe
Hitachi CD-SEMI 8820
Hitachi CD-SEM 8840
HItachi CD-SEM 9200
HItachi CD-SEM 9220
Hitachi CD-SEM 9260
HItachi FE-SEM S-4000
HItachi FE-SEM S-4500
HItachi FE-SEM S-4700
HItachi FE-SEM S-4800
HItachi FE-SEM S-5000
HItachi FE-SEM S-5200磁控濺射設備
AccuSputter AW 4450 Series
Perkin-Elmer 4400
Perkin-Elmer 4410
Perkin-ELmer 4450
Perkin-Elmer 4480
Perkin-Elmer 2400等離子刻蝕設備
Tegal 901e
Tegal 903e
Tegal 901e TTW
Tegal 903e TTW
Lam Research AutoEtch 490
Lam Research AutoEtch 590
Lam Research AutoEtch 690
Lam Research AutoEtch 790
Lam Research Rainbow 4420
Lam Research Rainbow 4520
Lam Research Rainbow 4620
Lam Research Rainbow 4720
Lam Research Rainbow 4428
Lam Research Rainbow 4528
Lam Research Rainbow 4628
Lam Research Rainbow 4728
Matrix 303
Gasonics AE 2001等離子去膠機掃底膜機
Matrix 105R
Matrix 105
Gasonics Aura 1000
Gasonics Aura 2000LL
Gasonics Aura 3000
Gasonics Aura 3010
Gasonics L3510
Branson IPC 3000
Branson IPC L3200真空快速退火爐
AccuThermo AW 610V
AccuThermo AW 820V
AccuThermo AW 860Vc sputtering,agitated thin film evaporator,aja sputter,aja sputtering,al sputtering,al2o3 thin film,ald cvd,ald deposition,ald equipment,ald system,ald vakuum,aluminium coating,aluminium sputtering,anelva sputter,anti glare coating,anti reflective coating,application of a vacuum,application of thin film,application of thin film technology,applications of thin film,applications of vacuum technology,argon sputtering,atomic layer deposition,atomic layer ,eposition system,basic vacuum technology,bias sputtering,black pvd coating,car is sputtering,car sputtering,carbon coater,carbon sputtering,cathode sputtering,cathodic sputtering,central vac,ceramic coating,ceramic thin film,chemical vapor deposition,chemical vapor deposition equipment,chemical vapor deposition method,chemical vapor deposition process,chemical vapor deposition system,chemical vapor deposition technique,chemical vapour deposition,chemical vapour deposition method,chemical vapour deposition pdf,chemical vapour deposition process,chemical vapour deposition technique,chrome plating,coating,coating aluminium,coating equipment,coating machine,coating pvd,coating services,coating technology,coating thin film,coatings,conformal coating,copper sputtering,cressington sputter coater,co-sputter,co-sputtering deposition,co=sputter coater,co-sputter coating,custom vacuum systems,cvd,cvd ald,cvd chemical vapor ,eposition,cvd chemical vapour deposition,cvd coating,cvd coatings,cvd deposition,cvd diamond coating,cvd engineer,cvd manufacturing,cvd process,cvd system,cvd systems,cylindrical magnetron sputtering,dc and rf sputtering,dc magnetron,dc magnetron sputter,dc magnetron sputtering,dc magnetron sputtering system,dc rf sputtering,dc sputter,dc sputter,dc sputter deposition,dc sputtering,dc sputtering,dc sputtering deposition,dc sputtering process,dc sputtering technique,dc sputtering vs rf sputtering,define sputter,define sputtering,definition of sputtering,dental vacuum systems,denton sputter,deposition controller,deposition define,deposition equipment,deposition material,deposition materials,deposition of thin films,deposition system,deposition systems,dielectric thin film,dielectric thin films,diode sputtering,dlc coating,e beam coating,e beam deposition,edwards sputter coater,edwards vacuum,electron beam deposition,electron beam evaporation system,electron beam evaporation technique,electron beam evaporator,electron beam physical vapor deposition,electron beam physical vapour deposition,electron beam sputtering,electron deposition,electronic sputtering,elmer systems,emitech sputter coater,engine sputtering,engine sputters,epoxy coating,evaporation coating,evaporation deposition,evaporation equipment,evaporation in vacuum,evaporation material,evaporation materials,evaporation pvd,evaporation sources,evaporation system,evaporation systems,evaporation vacuum,evaporation vs sputtering,evaporative deposition,filament evaporation,film coatings,film deposition,film deposition methods,film ito,gas flow sputtering,glass coating,glow discharge,glow discharge plasma,glow discharge sputtering,gold plating,gold sputter,gold sputter coater,gold sputter coating,gold sputtering,gold sputtering target,gold thin film,heraeus sputtering targets,high power impulse magnetron sputtering,high vacuum equipment,high vacuum products,high vacuum system,high vacuum system design,high vacuum systems,high vacuum techniques,high vacuum technology,hollow cathode sputtering,how to build a radio frequency generator,how to make a radio frequency generator,hydrophobic coating,implant semiconductor,indium tin oxide,indium tin oxide deposition,indium tin oxide film,indium tin oxide ito,indium tin oxide sputtering,indium tin oxides,inline sputter,inline sputtering,introduction to thin film,ion assisted deposition,ion beam deposition,ion beam deposition system,ion beam etch,ion beam etching,ion beam etching system,ion beam source,ion beam sputter,ion beam sputter deposition,ion beam sputtering,ion beam sputtering deposition,ion beam systems,ion source,ion sputter,ion sputtering,ion sputtering process,ion vapour deposition,ito coated glass,ito coating,ito deposition,ito films,ito indium tin oxide,ito oxide,ito sputter,ito sputter,ito sputtering,ito sputtering target,ito thin film,ito thin films,kdf sputter,laser sputtering,lawn mower sputtering,lawn mower sputters,magnetic sputtering,magnetic thin films,magnetron cathode,magnetron sputter,magnetron sputter deposition,magnetron sputter source,magnetron sputtering,magnetron sputtering deposition,magnetron sputtering ppt,magnetron sputtering principle,magnetron sputtering process,magnetron sputtering source,magnetron sputtering sources,magnetron sputtering system,magnetron sputtering technique,magnetron sputtering wikipedia,material deposition,material pvd,metal coating,metal evaporation deposition,metal sputter,metal sputtering,metal thin film,metallic coating,microwave signal generator,microwave test equipment,mirror coating,molybdenum sputtering,mrc sputtering system,multilayer thin film,nano coating,nano coatings,nickel sputtering,optical coating,optical thin film,optical thin film coatings,optical thin films,organic thin films,oxide thin films,pecvd,pecvd equipment,perkin elmer 4400,perkin elmer 4450,perkin-elmer 4400,Perkin-elmer 4480,perkin-elmer 2400,physical deposition,physical vapor deposition,physical vapor deposition coating,physical vapor deposition company,physical vapor deposition equipment,physical vapor deposition of thin films,physical vapor deposition process,physical vapor deposition pvd,physical vapor deposition sputtering,physical vapor deposition system,physical vapour deposition,physical vapour deposition method,physical vapour deposition pvd,planar magnetron sputtering,plasma chemical vapor deposition,plasma coating,plasma deposition,plasma deposition process,plasma enhanced chemical vapor deposition,plasma enhanced chemical vapour deposition,plasma pvd,plasma spray coating,plasma sputter,plasma sputtering,plasma sputtering deposition,plasma vacuum,plasma vapor deposition,plastic coating,polaron sputter coater,polymer coating,polyurethane coating,powder coating,protective coating,protective coatings,ptfe coating,pu coating,pulsed dc magnetron sputtering,pulsed dc sputtering,pulsed laser deposition,pvc coating,pvd,pvd applications,pvd coated,pvd coating,pvd coating,pvd coating equipment,pvd coating machine,pvd coating process,pvd coating service,pvd coating technology,pvd coating watch,pvd coatings,pvd cvd,pvd deposition,pvd equipment,pvd evaporation,pvd film,pvd finish,pvd gold plating,pvd machine,pvd magnetron,pvd magnetron sputtering,pvd material,pvd physical vapor deposition,pvd physical vapour deposition,pvd plasma,pvd plating,pvd process,pvd semiconductor,pvd service,pvd services,pvd sputter,pvd sputtering,pvd sputtering process,pvd system,pvd systems,pvd thin film,pvd tool,pvd vapor deposition,pvdf coating,radio frequency generator,radio frequency magnetron sputtering,radio frequency power supply,radio frequency sputtering,reactive magnetron sputtering,reactive sputter deposition,reactive sputter deposition,reactive sputtering,rf dc sputtering,rf magnetron,rf magnetron sputter,rf magnetron sputtering,rf magnetron sputtering system,rf pvd,rf sputter,rf sputter deposition,rf sputtering,rf sputtering deposition,rf sputtering pdf,rf sputtering principle,rf sputtering process,rf sputtering process,rf sputtering technique,roll to roll sputter,roll to roll sputtering,rubber coating,scientific vacuum systems,sem sputter coater,semiconductor equipment,semiconductor equipment manufacturers,semiconductor equipment manufacturing,semiconductor fabrication equipment,semiconductor implant,semiconductor process equipment,semiconductor processing equipment,semiconductor production equipment,semiconductor thin film,semiconductor thin films,signal generator,signal generators,silicon nitride sputtering,silicon sputtering,silver sputtering,silver thin film,sio2 sputtering,sol gel thin films,spin coater,spin coating,spray coating,spray pyrolysis deposition,sputter,sputter bearing,sputter bearings,sputter cathode,sputter chamber,sputter cleaning,sputter coat,sputter coated,sputter coater,sputter coater for sem,sputter coater price,sputter coaters,sputter coating,sputter coating,sputter coating glass,sputter coating process,sputter coating sem,sputter definition,sputter deposited,sputter deposition,sputter deposition process,sputter deposition rate,sputter deposition system,sputter deposition technique,sputter equipment,sputter etching,sputter film,sputter ion pump,sputter lyrics,sputter machine,sputter magnetron,sputter meaning,sputter out,sputter process,sputter rate,sputter source,sputter sputter sput,sputter stop,sputter system,sputter systems,sputter targets,sputter targets suppliers,sputter tool,sputter yield,sputter yield table,sputtered,sputtered definition,sputtered film,sputtered films,sputtered films inc,sputterer,sputtering,sputtering aluminum,sputtering animation,sputtering apparatus,sputtering applications,sputtering car,sputtering cathode,sputtering chamber,sputtering coating,sputtering components,sputtering components inc,sputtering dc,sputtering definition,sputtering deposition pdf,sputtering deposition process,sputtering deposition rate,sputtering deposition techniques,sputtering device,sputtering engine,sputtering equipment,sputtering equipment manufacturers,sputtering etching,sputtering evaporation,sputtering gas,sputtering gold,sputtering ito,sputtering lawn mower,sputtering machine,sputtering machines,sputtering magnetron,sputtering manual,sputtering material,sputtering materials,sputtering meaning,sputtering metal,sputtering method,sputtering parameters,sputtering pdf,sputtering plasma,sputtering power,sputtering ppt,sputtering pressure,sputtering principle,sputtering process,sputtering pvd,sputtering rate,sputtering rf,sputtering services,sputtering source,sputtering system,sputtering system ,manufacturers,sputtering systems,sputtering target,sputtering target bonding,sputtering target manufacturing,sputtering target market,sputtering target suppliers,sputtering ,targets,sputtering targets suppliers,sputtering technique,sputtering techniques,sputtering technology,sputtering thin film,sputtering unit,sputtering vs evaporation,sputtering wiki,sputtering wikipedia,sputtering yield,sputtering yield table,sputters,technology vacuum,teflon coating,the thin film,thermal chemical vapor deposition,thermal deposition,thermal evaporation,thermal evaporation deposition,thermal evaporation sources,thermal evaporator,thermal vapor deposition,thick film deposition,thin coatings,thin film,thin film application,thin film applications,thin film batteries,thin film battery,thin film ceramic,thin film characterization,thin film circuit,thin film circuits,thin film coating,thin film coating companies,thin film coating jobs,thin film coating materials,thin film coating methods,thin film coating techniques,thin film coating technology,thin film coatings,thin film deposition,thin film deposition by evaporation,thin film deposition equipment,thin film deposition jobs,thin film deposition methods,thin film deposition pdf,thin film deposition process,thin film deposition services,thin film deposition system,thin film deposition technique,thin film deposition techniques,thin film deposition technology,thin film equipment,thin film etching,thin film evaporation,thin film evaporator,thin film evaporators,thin film fabrication,thin film fabrication techniques,thin film glass,thin film growth,thin film industries,thin film introduction,thin film jobs,thin film labs,thin film material,thin film materials,thin film optical,thin film optical coatings,thin film physics,thin film preparation,thin film process,thin film process engineer,thin film processes,thin film processing,thin film products,thin film properties,thin film ,semiconductor,thin film service,thin film services,thin film solar,thin film solar cell,thin film solar cells,thin film solution,thin film sputtering,thin film stress,thin film substrates,thin film systems,thin film techniques,thin film technologies,thin film technology,thin film technology ppt,thin film thermocouple,thin film thickness measurement,thin film uses,thin films,thin films applications,thin films deposition,thin films deposition techniques,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films introduction,thin films physics,thin films physics,thin films physics,thin films physics,thin films physics,thin films physics,thin films physics,thin films technology,thin metal film,thin metal film,thin metal films,thin solid films,thinfilm,tin coating,tin indium oxide,tin oxide thin film,tio2 sputter,tio2 sputtering,titanium coating,titanium nitride coating,titanium nitride sputtering,titanium sputtering,triode sputtering,tungsten carbide coating,types of chemical vapor deposition,types of sputtering,uhv sputtering,uhv sputtering inc,ultra high vacuum system,umicore thin film products,unbalanced magnetron sputtering,used evaporators for sale,used semiconductor manufacturing equipment,used sputter coater,used sputtering equipment,used sputtering system,used thin film evaporator,uv coating,vacuum chamber cleaning,vacuum chambers,vacuum chambers suppliers,vacuum coater,vacuum coaters,vacuum coating,vacuum coating equipment,vacuum coating info,vacuum coating machine,vacuum coating process,vacuum coating system,vacuum coating systems,vacuum coating technologies,vacuum coating technology,vacuum coatings,vacuum deposition,vacuum deposition chamber,vacuum deposition equipment,vacuum deposition of thin films,vacuum deposition process,vacuum deposition system,vacuum deposition systems,vacuum equipment,vacuum equipment manufacturers,vacuum evaporation equipment,vacuum evaporation process,vacuum evaporation sources,vacuum evaporation system,vacuum metal deposition,vacuum metallizing,vacuum plasma,vacuum plasma treatment,vacuum product,vacuum products,vacuum sputtering,vacuum system design,vacuum system design software,vacuum systems,vacuum tech,vacuum technology,vacuum thermal evaporation,vacuum vapor deposition,vacuum vessel,vacuum web coating,vanadium dioxide thin films,vapor deposition,vapor deposition coating,vapor deposition equipment,vapor deposition process,vapour deposition,vapour deposition coating,vapour deposition process,wafer fab equipment,wafer fabrication equipment,what is a sputtering target,what is a thin film,what is chemical vapor deposition,what is pvd coating,what is sputtering,what is thin film,what is thin film deposition,what is thin films,what is vacuum coating,wiped film evaporator,wiped film evaporators,zno sputtering,zno thin films
采購中心
化工儀器網(wǎng)